| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a gas filter with low probability of contamination and capable of preventing contamination, easily charging particles in a gas at a low cost, and trapping the particles and a gas supplying apparatus. <P>SOLUTION: In an end filter 9 comprising a base part 91 having a gas flow-in inlet 91 and a gas discharge outlet 91d to ventilate a gas, a storage cylinder 92 composing a casing by being screwed in the base part 91, and a filter member 93 which is stored in the base part 91 and the storage cylinder 92 in a manner of isolating the gas flow-in inlet 91c and the gas discharge outlet 91d and which traps particles in a gas flowing in through the gas flow-in inlet 91c; a particle charging plate 96 in which a charging hole 96a for charging the particles in the gas by ventilation of the gas is installed at the gas flow-in inlet 91c of the base part 91. Further, the end filter 9 is installed in the gas supplying apparatus. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
