| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce production costs through miniaturization and simplification of a device by not requiring a return carrier line, thus resulting in actualization of price reduction of products such as solar cells and the like. <P>SOLUTION: An in-line type processing apparatus is composed of a pair of factory-side conveyor lines 1 and 1' arranged in parallel with a predetermined interval for conveying a raw material K<SB>0</SB>or a product, a primary processing line L<SB>1</SB>composed by arranging multiple processing chambers in a single line between the pair of factory-side conveyor lines 1 and 1', which performs predefined processing while conveying workpieces in the multiple processing chambers from one to the other of the pair of the factory-side conveyor lines 1 and 1', a secondary processing line L<SB>2</SB>composed by arranging multiple processing chambers in a single line between the pair of factory-side conveyor lines 1 and 1', which performs predefined processing while conveying the workpieces in the multiple processing chambers from the latter to the former of the pair of the factory-side conveyor lines 1 and 1', and a conveyor line C arranged so as to circulate from the primary line L<SB>1</SB>to the secondary one L<SB>2</SB>for conveying a holder for an object to be processed or one processed. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
