COLLECTION JIG, AND POLLUTING-MATTER COLLECTION APPARATUS HAVING SAME JIG

摘要

<P>PROBLEM TO BE SOLVED: To provide a collection jig which allows a liquid to contact only the outer peripheral portion of a wafer accurately, and also to provide a polluting-matter collection apparatus which collects the polluting matter staying on the outer peripheral portion of the wafer simply and efficiently with the collection jig provided thereto. Ž<P>SOLUTION: The collection jig 30 provided to the polluting-matter collection apparatus has a collection body 31 and a controlling means 32. The controlling portion 32 can seal a storing portion 34 of the collection body 31 with stores a liquid by fitting to the upper portion of the collection body 31 with screws. The liquid is thereby brought into contact only with the end surface of the outer peripheral portion of the wafer when the wafer is inserted into a penetration portion 35 of the collection body 31 for exposing the liquid stored in the storing portion 34 to the outside. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž