| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a both-side coating apparatus and a both-side coating method of a coating liquid capable of reducing the variation of a coating amount and controlling the coating amount with high accuracy even if applying the coating liquids to a plurality of substrates to be treated. Ž<P>SOLUTION: The both-side coating apparatus 1 includes a holding mechanism 3a for holding the substrate 2 to be treated so that the thickness direction of the substrate 2 to be treated is a horizontal direction, a rotary drive mechanism for rotating the substrate 2 to be treated circumferentially, a coating liquid nozzle 18a for jetting the coating liquids to both main surfaces 2a of the substrate 2 to be treated, and a head rinsing nozzle 19a for jetting a rinsing liquid and washing the coating liquid nozzle 18a. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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