发明名称 |
METHOD OF MANUFACTURING LIQUID JET HEAD, METHOD OF MANFUACTURING PIEZOELECTRIC ELEMENT AND LIQUID JET APPARATUS |
摘要 |
A method of manufacturing a piezoelectric element includes a piezoelectric layer forming step of sequentially and repeatedly performing a heat treatment step of applying a piezoelectric material containing lead to a lower electrode film at a relative humidity in the range of 30% to 50% Rh and then performing a heat treatment to form a piezoelectric precursor film and a crystallization step of firing the piezoelectric precursor film to form a piezoelectric film on the lower electrode film, thereby forming a piezoelectric layer.
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申请公布号 |
US2009262169(A1) |
申请公布日期 |
2009.10.22 |
申请号 |
US20090405984 |
申请日期 |
2009.03.17 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
SHINBO TOSHINAO;HAKEDA KAZUSHIGE;SUMI KOJI;NISHIWAKI TSUTOMU |
分类号 |
B41J2/045;B21D53/76 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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