A WAFER BOAT FOR A SEMICONDUCTOR DEVICE FABRICATION

摘要

PURPOSE: A wafer boat used in a semiconductor manufacture is provided to prevent collision with a transfer robot by preventing separation and a slip phenomenon of a wafer. CONSTITUTION: A wafer boat(100) loads a plurality of wafers inside a semiconductor manufacturing device, and includes a top plate member(110), a bottom plate member(120), three or more supporting rods(130), and a plurality of supporting plates(140). The top plate member and the bottom plate member are a top part and a bottom part of the boat. The supporting rods are vertically installed between the top plate member and the bottom plate member. The supporting plates are installed in the supporting rod with a fixed gap, and have a top surface for supporting a bottom surface of the wafer.