| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor having heightened measurement performance by optimizing properly control of a heating means. SOLUTION: This pressure sensor includes a pressure receiving part 1 for detecting a pressure, a heater 2 for heating the pressure receiving part 1 by electric power supplied from an external power source 6, a pressure receiving part temperature sensor 3 for detecting the temperature of the pressure receiving part 1, and a heater control circuit 4 for controlling a heating amount by the heater 2 so that the temperature detected by the pressure receiving part temperature sensor 3 agrees with a set temperature set beforehand. The pressure sensor is also equipped with a supply voltage detection circuit 26 for detecting a voltage of the external power source 6, and a controller 5 for calculating a PID parameter corresponding to a voltage detected by the supply voltage detection circuit 26. The heater control circuit 4 controls the heating amount by the heater 2 by a feedback control rule based on the PID parameter calculated by the controller 5. COPYRIGHT: (C)2010,JPO&INPIT |
