摘要 |
The circulator has condenser type electrostatic-actuation micro switches (MEMS1, MEMS2) formed on a substrate, and an antenna port (p2) and an outlet port (p3) that are arranged on a discontinuous radio frequency signal line (Ls). An inlet port (p1) is located on a continuous radiofrequency signal line (Lp). The switch (MEMS1) connects the signal lines by self-actuating membrane under an effect of input signal power. The switches are separated by a distance of an order of one quarter of length of wave corresponding to a frequency of the signal. The lines have an insulating material e.g. lead zirconate titanate, zirconium oxide silicon nitride, upper layer. |