发明名称 |
DEVICE FOR GENERATING COLD PLASMA IN A VACUUM CHAMBER AND USE OF SAID DEVICE FOR THERMO-CHEMICAL PROCESSING |
摘要 |
<p>In apparatus for generating cold plasma in an evacuated vessel using a cathode body (1) with hollow plasma confinement chambers (1a), each chamber is associated with a magnetic field source (2) causing electrons to rotate around its lines of force. The cathode body is provided with a cooling fluid circulating element (3) to extract heat generated by the intense ionic bombardment in each of the hollow chambers.</p> |
申请公布号 |
EP2110007(A2) |
申请公布日期 |
2009.10.21 |
申请号 |
EP20080762026 |
申请日期 |
2008.02.01 |
申请人 |
H.E.F. |
发明人 |
MAURIN-PERRIER, PHILIPPE;CHAVANNE, HERVE;POIGT, LAURE |
分类号 |
H05H1/24 |
主分类号 |
H05H1/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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