Yttrium-containing ceramic coating

摘要

The present invention relates to an yttrium-containing ceramic coated material and a method of manufacturing the same. In the ceramic coated material of the invention, an amorphous yttrium-containing ceramic film having a thickness of 10 nm to 500 nm is formed on a substrate surface, a crystalline graded layer whose crystallinity increases gradually from the lower layer is formed on the amorphous yttrium-containing ceramic film, and further, a crystalline yttrium-containing ceramic film is formed on the crystalline graded layer.