发明名称 |
Contactless measurement of beam current in charged partical beam system |
摘要 |
A beam current measurement assembly for measuring a current of a charged particle beam in a charged particle beam device having a charged particle beam source is described. The beam current measurement assembly includes a beam modulation unit for repeatedly changing the current of the charged particle beam for providing a modulated charged particle beam, and a measurement unit adapted for measuring an inductive signal generated by the repeatedly changing charged particle beam current.
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申请公布号 |
EP2110844(A1) |
申请公布日期 |
2009.10.21 |
申请号 |
EP20080154575 |
申请日期 |
2008.04.15 |
申请人 |
ICT, INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUERHALBLEITERPRUEFTECHNIK MBH |
发明人 |
FROSIEN, JUERGEN |
分类号 |
H01J37/244;G01R19/00;H01J37/24 |
主分类号 |
H01J37/244 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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