| 发明名称 |
SEMICONDUCTOR MANUFACTURING APPARATUS, ABNORMALITY DETECTION IN SUCH SEMICONDUCTOR MANUFACTURING APPARATUS, METHOD FOR SPECIFYING ABNORMALITY CAUSE OR PREDICTING ABNORMALITY, AND RECORDING MEDIUM WHEREIN COMPUTER PROGRAM FOR EXECUTING SUCH METHOD IS RECORDED |
| 摘要 |
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| 申请公布号 |
EP1845553(B1) |
申请公布日期 |
2009.10.21 |
| 申请号 |
EP20050820365 |
申请日期 |
2005.12.22 |
| 申请人 |
TOKYO ELECTRON LTD. |
发明人 |
SAKAMOTO, KOICHI;OBATA, MINORU;KOYAMA, NORIAKI |
| 分类号 |
G05B23/02;C23C16/44;H01L21/205 |
主分类号 |
G05B23/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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