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发明名称
摘要
申请公布号
JP4348584(B2)
申请公布日期
2009.10.21
申请号
JP20000041660
申请日期
2000.02.18
申请人
发明人
分类号
B30B15/00;B30B15/34;B30B1/42;H01L21/603
主分类号
B30B15/00
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