发明名称 |
SPHERICAL ABERRATION CORRECTION ELECTROSTATIC LENS, INPUT LENS, ELECTRON SPECTROSCOPIC DEVICE, PHOTOELECTRON MICROSCOPE, AND MEASUREMENT SYSTEM |
摘要 |
A mesh (M) having an ellipsoid shape or a shape close to the ellipsoid shape is attached to an electrode (EL1) among electrodes (EL1 to ELn). Voltages of the later-stage electrodes (EL2 to ELn) are appropriately set. With this arrangement, a local negative spherical aberration generated by the mesh (M) is cancelled out with a positive spherical aberration. This optimizes an electric field distribution. As a result, this realizes an electrostatic lens whose acceptance angle is extended to about ±60°. |
申请公布号 |
EP1793410(A4) |
申请公布日期 |
2009.10.21 |
申请号 |
EP20040822204 |
申请日期 |
2004.11.09 |
申请人 |
NATIONAL UNIVERSITY CORPORATION NARA INSTITUTE OFSCIENCE AND TECHNOLOGY;JEOL LTD. |
发明人 |
DAIMON, HIROSHI;MATSUDA, HIROYUKI;KATO, MAKOTO;KUDO, MASATO |
分类号 |
H01J37/244;G01N23/227;H01J37/12;H01J37/285 |
主分类号 |
H01J37/244 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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