| 摘要 |
PURPOSE: A patterning apparatus for manufacturing a solar battery for preventing the damage of a scribing object is provided to control deformation according to the distortion of your position control. CONSTITUTION: A patterning apparatus for manufacturing a solar battery for preventing the damage of a scribing object includes a z-axis stage(310), a needle(356), and a location pressure control unit. The location pressure control unit controls the displacement and the pressure. The location pressure control unit includes a housing, an encoder, a needle support stand, a voice coil, a position controller, and a current controller. The housing is fixed to and combined with the z-axis stage. The encoder is equipped within the housing. The encoder is adhered in the needle support stand. |
