OPTOFLUIDIC DEVICE AND ITS MANUFACTURE METHOD

摘要

PURPOSE: A photon fluid element and a manufacturing method thereof for manufacturing three dimensional photon crystal without complex arrangement are provided to reduce combination and simplify a manufacturing process. CONSTITUTION: A photon fluid element manufacture method is as follows. A micro-fluid channel is formed by using a photolithographic method. A photon nano structure having three dimensional photon determination inside a channel includes by using a holography etching method. The holography etching method is transferred to the photo resist film in which the laser beam is by mixing a photo-initiator.