发明名称 Reticle box transport cart
摘要 A new transportation cart is provided that separates each reticle box or container from other reticle boxes contained in the cart. The transportation cart provides additional shock absorption, thus eliminating effects of vibration of the reticles, the transportation cart is equipped with ESD protection and provides improved security to the transported reticles.
申请公布号 US7604306(B1) 申请公布日期 2009.10.20
申请号 US20010934549 申请日期 2001.08.23
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY 发明人 CHENG LIN
分类号 A47B46/00 主分类号 A47B46/00
代理机构 代理人
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