发明名称 |
Probe card, apparatus and method for inspecting an object |
摘要 |
A probe card, an apparatus and a method of inspecting an object. In the example method, a first inspection current may be divided into a plurality of first divided inspection currents. Each of the first divided inspection currents may be supplied to a different one of a plurality of first chips. A second inspection current may be selectively applied to a second chip other than the first plurality of chips. In an example, the second inspection current may be substantially equal to at least one of the plurality of first divided inspection currents. In a further example, the example probe card and/or the apparatus may perform the example method.
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申请公布号 |
US7605596(B2) |
申请公布日期 |
2009.10.20 |
申请号 |
US20060510620 |
申请日期 |
2006.08.28 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM YANG-GI;YOO SANG-KYU;MOON BYUNG-SOO;CHO MI-YEON |
分类号 |
G01R31/02;G01R31/26 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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