发明名称 Hermetically sealed structure, piezoelectric device and improvement of method for manufacturing the same
摘要 A hermetically sealed structure in which a base substrate 31 and a lid 33 are hermetically sealed, the base substrate serving as a part of a containing body for uniformly forming or bonding an electronic part, the lid being a lid body to be hermetically bonded to the base substrate, is structured as follows: the lid is made from a material, through which light passes; as a metal layer 25 of at least a sealing portion of the lid a platable layer 22 for performing plating and a bonding layer 24 made from gold, the bonding layer being formed closer to the front side than the platable layer are formed; and the lid is structured so as to be bonded to the base substrate 31 by an Au-Ge alloy.
申请公布号 US7605521(B2) 申请公布日期 2009.10.20
申请号 US20070621186 申请日期 2007.01.09
申请人 EPSON TOYOCOM CORPORATION 发明人 KUWAHARA TAKUO
分类号 H01L41/08 主分类号 H01L41/08
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