发明名称 |
Method for coating internal member having holes in vacuum processing apparatus and the internal member having holes coated by using the coating method |
摘要 |
A method of forming a coating film of ceramic material on a surface of an internal member disposed in a vacuum processing apparatus, the surface of the internal member having holes formed therein. The method involves: (A) filling the holes of the internal member with padding plugs, each of which has a core member made from a metal material and a metal-resin composite layer covering the circumferential surface of the core member, the metal-resin composite layer being a complex composed of a metal material and a resinous material exhibiting nonconjugative property to a coating film; (B) forming a ceramic coating film on the surface of the internal member by plasma spraying after step (A); and (C) extracting the padding plugs out of the holes after step (B).
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申请公布号 |
US7604845(B2) |
申请公布日期 |
2009.10.20 |
申请号 |
US20030663793 |
申请日期 |
2003.09.17 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
TAKEUCHI JUN;KISHIDA MASAAKI;MATSUNAGA TADAKAZU;ENDOH SHOSUKE |
分类号 |
B05D1/32;C23C18/52;C23C4/00;C23C4/02;C23C4/06;C23C4/08;C23C4/10;H01L21/68;H01L21/683 |
主分类号 |
B05D1/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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