发明名称 Piezoelectric device, its manufacturing method, and touch panel device
摘要 A piezoelectric device (X) includes a substrate (11) a piezoelectric film (12), a first electrode (13), and a second electrode (14). At least one of the first electrode (13) and the second electrode (14) is interposed between the substrate (11) and the piezoelectric film (12), and made of an Al alloy containing 0.1 to 3 wt % of at least one metal selected from the group consisting of Ti, Cr, Ni, Cu, Zn, Pd, Ag, Hf, W, Pt and Au.
申请公布号 US7605523(B2) 申请公布日期 2009.10.20
申请号 US20050283844 申请日期 2005.11.22
申请人 FUJITSU LIMITED 发明人 KATSUKI TAKASHI;NAKAZAWA FUMIHIKO;SANO SATOSHI;TAKAHASHI YUJI
分类号 H01L41/08;G06F3/033;G09G5/00;H01L41/047;H01L41/22 主分类号 H01L41/08
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