<p>PURPOSE: A multilayered ceramic substrate is provided to prevent an edge crack due to difference of coefficient of thermal expansion between laminate by forming a groove part in intermediate laminate having high coefficient of thermal expansion. CONSTITUTION: A first laminate(10a) is made of a ceramic green sheet having a first thermal expansion coefficient. A second laminate(20) is made of a ceramic green sheet having a second thermal expansion coefficient different from the first thermal expansion coefficient. The second laminate is laminated on one of a top surface and a bottom surface of the first laminate. A third laminate(30) is made of a ceramic green sheet having a third thermal expansion coefficient different from the first thermal expansion coefficient. The third laminate is laminated on one of the top surface and the bottom surface of the first laminate. A buffer part(40) is formed on a surface of the first laminate. The buffer part prevents an edge crack due to an inner crack generated in the first laminate.</p>
