发明名称 METHOD FOR MANUFACTURING THIN FILM PATTERN
摘要 PURPOSE: A method for forming a thin film pattern is provided to reduce a process device and a process step for manufacturing a pattern by selectively forming a thin film pattern on a surface of a substrate. CONSTITUTION: A substrate(100) is prepared. A surface of the substrate is divided into a hydrophilic region(400) and a hydrophobic region(300). A thin film forming material(500) having one property of a hydrophilic property and a hydrophobic property is coated on the surface of the substrate divided into the hydrophilic region and the hydrophobic region. A thin film is formed on one of the hydrophilic region and the hydrophobic region of the surface of the substrate.
申请公布号 KR20090108863(A) 申请公布日期 2009.10.19
申请号 KR20080034181 申请日期 2008.04.14
申请人 JUSUNG ENGINEERING CO., LTD.;ADS 发明人 LEE, HYUNG SUP;JEON, CHANG YEOP
分类号 H01L21/20;H01L21/3065 主分类号 H01L21/20
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