| 摘要 |
PURPOSE: A utility flow rate control device of a semiconductor manufacturing facility is provided to control a utility gas of an output module and ion deionized water of a flow rate controller. CONSTITUTION: A controller of a system control part for controlling a system of a semiconductor manufacturing device includes a plurality of photo couplers(PT1~PT16), a plurality of comparators(21~28), a central processing unit part(20), an output control part(57), a communication control part(58), and a timer(56). The photo couplers detect a current of signals inputted through an input module, and change the current into contact signals. The comparators compare identity of the contact signals. The central processing unit part receives an input signal inputted in the comparators, and controls the output control part. The output control part receives a command of the central processing unit part, and controls a DC voltage supplied to an output module.
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