FABRICATING METHOD OF STAMP FOR IMPRINT LITHOGRAPHY

摘要

PURPOSE: A method for producing a stamp for imprint lithography is provided to form pattern by oxidizing the surface of cylindrical body and produce the stamp of roll shape. CONSTITUTION: A method for producing a stamp for imprint lithography comprises: a step of applying aluminum layer to cylindrical body (110); a step of oxidizing aluminum layer to form micro pattern; a step etching body; and a step of isolating aluminum layer from the body.