发明名称 IMAGE EXPOSURE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To improve resolution by eliminating the distortion of an image shape projected on micromirrors due to distortion and the like of the micromirrors. <P>SOLUTION: An exposure head 18 of a digital exposure device includes a DMD 56 which modulates light from a light source by a plurality of micromirrors, a microlens array 63 wherein microlenses 63a for individually condensing light beams from respective micromirrors are formed, and a filter array 64 wherein filters 64a corresponding to the microlenses 63a respectively are formed. The filters 64a are provided in order to correct the distortion of an image on micromirrors formed by microlenses 63a and have transmittance distributions so as to attenuate light more toward peripheral edges. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009237321(A) 申请公布日期 2009.10.15
申请号 JP20080083993 申请日期 2008.03.27
申请人 FUJIFILM CORP 发明人 KOMUKAI MAKITO;ISHIKAWA HIROMI
分类号 G03F7/20;G02B3/00;G02B5/00;H01L21/027 主分类号 G03F7/20
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