| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration gyro sensor with excellent sensitivity characteristic and response characteristic. <P>SOLUTION: This vibration gyro sensor 10 includes driving vibration arms 14A, 14B, 14C, 14D comprising the same material respectively, and detection vibration arms 15A, 15B, 15C, 15D. The driving vibration arms 14A, 14B, 14C, 14D are formed so that a Young's modulus of the material in a parallel direction to the vibration direction P becomes relatively high. Meanwhile, the detection vibration arms 15A, 15B, 15C, 15D are formed so that a Young's modulus of the material in a parallel direction to the vibration directions Q1, Q2 becomes relatively low. Hereby, the response characteristic can be improved, while maintaining the sensitivity characteristic. <P>COPYRIGHT: (C)2010,JPO&INPIT |
