摘要 |
<P>PROBLEM TO BE SOLVED: To reliably form a side surface insulating film even to a thin laminated structure in a laminated piezoelectric element which is used as an ultrasonic transducer, a piezoelectric actuator or the like. <P>SOLUTION: The laminated piezoelectric element includes a laminated structure wherein an end of an internal electrode is positioned at a protrusion of any of sides because the sides form a step difference, a side surface insulating film covering an end of the internal electrode at the protrusion on the side surface of the laminated structure, a first planar electrode formed on of major surfaces of the laminated structure, a second planar electrode formed on the other main surface of the laminated structure, first side surface electrodes which are formed on a first side surface of the laminated structure and which are connected to a first group of electrodes as odd-numbered electrodes of the first and second planar electrodes and the internal electrodes, and second side surface electrodes which are formed on a second side surface of the laminated structure and which are connected to a second group of electrodes which do not belong to the first electrode group in the first and second planar electrodes and the internal electrodes. <P>COPYRIGHT: (C)2010,JPO&INPIT |