| 摘要 |
<P>PROBLEM TO BE SOLVED: To expand an adjustment range of an oscillation frequency. <P>SOLUTION: A base material 10 includes a base part 16, and a plurality of arm sections 18 arranged and extended in a direction crossing the thickness direction of the base part 16 from the base part 16. At each of the arm sections 18, the base material 10 is prepared, which has a first side 13 opposing the adjacent arm section 18 and a second side 15 facing a side opposite to the first side 13, and has an exposure region 30 in which at least one of the first and second sides 13, 15 is exposed. The exposure region 30 is etched. By etching, the width of the arm section 18 is reduced, thus lowering flexural rigidity in the width direction of the plurality of arm sections 18. <P>COPYRIGHT: (C)2010,JPO&INPIT |
