| 摘要 |
PROBLEM TO BE SOLVED: To provide a method, apparatus, and system for the evaluation and calibration of dual-wavelength laser interferometers, which highly accurately evaluates and calibrates dual-wavelength laser interferometers over a long-stroke measuring range in detail. SOLUTION: The method, apparatus, and system for the evaluation and calibration of dual-wavelength laser interferometers is provided with: a vacuum container 2 arranged in the optical path of measuring light flux of a dual-wavelength laser interferometer 1 and having planar mirrors 22 and 23 in the inner and outer surfaces of a face opposed to the measuring light flux; a drive mechanism 3 for moving the face of the vacuum container along the optical path of the measuring light flux; a reference laser interferometer 4 for guiding the measuring light flux into the vacuum container, superposing light flux reflected by a reflecting surface in the vacuum container on light flux reflected by a reference surface, and determining the amount of displacement of the reflecting surface in the vacuum container; and an evaluation and calibration means 5 for evaluating and calibrating the dual-wavelength laser interferometer by comparing measurement values acquired by the reference laser interferometer with measurement values acquired by the dual-wavelength laser interferometer when the vacuum container is moved by the drive means. COPYRIGHT: (C)2010,JPO&INPIT |
