| 发明名称 |
METHOD FOR FORMING CONE EMITTER |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To easily control a cone emitter distribution while simplifying manufacturing procedures by reducing control parameters in processes. <P>SOLUTION: A method for forming a cone emitter on the top surface of a BN thin film performs the crystallization by irradiating the ultraviolet light onto the top surface of the amorphous BN thin film that is formed on the top surface of a substrate and has a flat top surface. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
| 申请公布号 |
JP2009238504(A) |
申请公布日期 |
2009.10.15 |
| 申请号 |
JP20080081441 |
申请日期 |
2008.03.26 |
| 申请人 |
NATIONAL INSTITUTE FOR MATERIALS SCIENCE |
发明人 |
KOMATSU SHOJIRO;CHIKYO TOYOHIRO;SATO YUHEI;HIRANO DAISUKE |
| 分类号 |
H01J9/02 |
主分类号 |
H01J9/02 |
| 代理机构 |
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