| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate inspection device having an inexpensive and simple constitution using a floating stage. Ž<P>SOLUTION: The substrate inspection device is equipped with: the floating stage 2 for floating a substrate (10) to be inspected to support the same; a light source positioned above the floating stage 2 to emit dark field illumination light to the substrate (10) to be inspected; a scattering/reflecting part 2a positioned above the floating stage 2 to scatter and reflect the dark-field illumination light; and an optical system (3) for performing the vertical illumination dark-field observation of the substrate (10) to be inspected. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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