| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact displacement meter capable of stable display by eliminating an influence of a temperature drift. SOLUTION: This displacement meter has a casing 11, a contact 12 mounted movably in one direction, and an image sensor 13, and measures a relative displacement of the contact 12 from a reference position. The displacement meter stores an expansion/contraction amount equivalent amount of the contact 12 in a temperature equilibrium state corresponding to each relative position to the casing 11 of the contact 12, and information on a change with time of the expansion/contraction amount equivalent amount. The displacement meter extracts the expansion/contraction amount equivalent amount in the temperature equilibrium state based on a relative position read by the image sensor 13, and corrects the relative position based on the expansion/contraction amount equivalent amount calculated based on the expansion/contraction amount equivalent amount calculated in the past, the extracted expansion/contraction amount equivalent amount in the temperature equilibrium state, the information on the change with time, and a reading time difference between the read relative position and a relative position corresponding to the expansion/contraction amount equivalent amount calculated in the past. COPYRIGHT: (C)2010,JPO&INPIT
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