| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration gyro sensor with excellent sensitivity characteristic and response characteristic. <P>SOLUTION: This vibration gyro sensor 10 includes: driving vibration arms 14A, 14B; driving piezoelectric elements 20A, 20B for driving the driving vibration arms 14A, 14B; detection vibration arms 14A, 14B to be excited corresponding to angular velocity generated when rotating the vibration gyro sensor 10, while vibrating the driving vibration arms 14A, 14B; and detection piezoelectric elements 30A, 30B for detecting vibration of the detection vibration arms 14A, 14B. The film of each detection electrode of the detection piezoelectric elements 30A, 30B is formed thicker than the film of each driving electrode of the driving piezoelectric elements 20A, 20B. Hereby, only Q<SB>y</SB>of the detection vibration arms 15A, 15B related to the response characteristic can be lowered, while maintaining Q<SB>x</SB>of the driving vibration arms 14A, 14B related to the sensitivity characteristic. <P>COPYRIGHT: (C)2010,JPO&INPIT |
