| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent excessive displacement of a diaphragm when a large differential pressure is applied; to measure over a wide differential pressure range; and to measure with high resolution in a low differential pressure range. Ž<P>SOLUTION: This diaphragm 112 is equipped with a center part 112C to be moved forward by increase of a differential pressure between a high-pressure chamber 108 and a low-pressure chamber 104, and a flange part 112B for supporting the center part 112C movably. The flange part 112B has an outside ring part 112BA and an inside ring part 112BB. A guide 106A for restricting excessive displacement of the diaphragm 112 is arranged in front of the flange part 112B. When the differential pressure is in a low pressure range, both the outside ring part 112BA and the inside ring part 112BB are separated from the guide 106A, and an effective pressure receiving area is large. When the differential pressure is in a high pressure zone, the outside ring part 112BA abuts on the guide 106A and the inside ring part 112BB is separated from the guide, and the effective pressure receiving area is small. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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