| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a temperature adjusting device not wastefully consuming energy in aging a temperature of a chamber. <P>SOLUTION: This temperature adjusting device includes a temperature adjusting system for successively distributing the air taken from a chamber R to a cooling section C, a first heating section D and a second heating section E, and returning the same to the chamber R, and a main control unit HR3 for executing the temperature adjustment control. The main control unit HR3 performs the aging control by operating the cooling section C and the first heating section D without performing the heating by an electric heater 18 of the second heating section E while the deviation between a measured value of a chamber temperature sensor TS3 for measuring an internal temperature of the chamber R and a temperature adjustment target value is over a prescribed value. On the contrary, the temperature adjustment control of high accuracy is performed by the cooling section C, the first heating section D and the electric heater 18 of the second heating section E, while the deviation is less than the prescribed value. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
