发明名称 LASER-SCRIBING PLATFORM
摘要 <p>Laser-scribing systems (100) and translation stages (102) operable to support a workpiece (104) during laser scribing are provided. A laser-scribing system (100) includes a base section, a bed (102) supported by the base section, a laser (202, 302, 442), a first driving mechanism (114, 116) operable to move a workpiece (104) longitudinally along the bed (102), and a second driving mechanism (134, 136, 522, 524). The bed (102) comprises a movable section (554, 620) configured to translate with respect to the base section. The movable section (554, 620) comprises a gap to allow a laser beam to pass through. The laser (202, 302, 442) is positioned to direct the laser beam through the gap. The second driving mechanism (134, 136, 532, 524) is operable to laterally translate the laser (202, 320, 442) and the movable section (554, 620) in order to scribe a pattern on the workpiece (104).</p>
申请公布号 WO2009126899(A2) 申请公布日期 2009.10.15
申请号 WO2009US40228 申请日期 2009.04.10
申请人 APPLIED MATERIALS, INC.;KRISHNASWAMI, SRIRAM;KURITA, SHINICHI;SHAMOUN, BASSAM;JOHNSTON, BENJAMIN, M.;WHITE, JOHN, M.;FAN, JIAFA;HUANG, INCHEN 发明人 KRISHNASWAMI, SRIRAM;KURITA, SHINICHI;SHAMOUN, BASSAM;JOHNSTON, BENJAMIN, M.;WHITE, JOHN, M.;FAN, JIAFA;HUANG, INCHEN
分类号 B23K26/38;H01L21/78 主分类号 B23K26/38
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