MOLD, PROCESS FOR PRODUCING THE SAME, AND PROCESS FOR PRODUCING SUBSTRATE HAVING TRANSFERRED FINE PATTERN

摘要

A mold is provided which has high light transmission and high releasability and has a fine pattern having a relatively large maximum height. Also provided are: a process for producing the mold; and a process for producing a substrate with a transferred fine pattern using the mold. The mold (10) includes a transparent resin layer (A) (12) constituted of a transparent resin and having chemical bonds based on a functional group (x) in the surface thereof on the interlayer (C) side, an interlayer (C) (14) comprising a fluoropolymer (II) which has a backbone having a fluorinated alicyclic structure and has a reactive group (y) reactive with the functional group (x), and a surface layer (B) (16) comprising a fluoropolymer (I) which has a backbone having a fluorinated alicyclic structure and does not have the reactive group (y), the transparent resin having a glass transition temperature not higher than the glass transition temperatures of the fluoropolymer (I) and the fluoropolymer (II). The fine pattern has a maximum height exceeding the sum of the thickness of the surface layer (B) and the thickness of the interlayer (C).