| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical sensor including an ultraviolet-ray sensor and a visible-light sensor in one chip. SOLUTION: The optical sensor 1 has the visible-light sensor 3 formed on a semiconductor support substrate 11 and the ultraviolet-ray sensor 5 formed on the SOI layer 13 of an SOI substrate 10 composed of the semiconductor support substrate 11 and the SOI layer 13 disposed on the semiconductor support substrate 11 with a buried oxide film 12 interposed. The visible-light sensor 3 has a first photodiode 21 for visible light, a second photodiode 22 for visible light, and a third photodiode 23 for visible light. The ultraviolet-ray sensor 5 has a photodiode 41 for ultraviolet rays. COPYRIGHT: (C)2010,JPO&INPIT
|
