| 发明名称 |
DEVICE HAVING THIN BLACK MASK AND METHOD OF FABRICATING THE SAME |
| 摘要 |
A thin black mask is created using a single mask process. A dielectric layer is deposited over a substrate. An absorber layer is deposited over the dielectric layer and a reflector layer is deposited over the absorber layer. The absorber layer and the reflector layer are patterned using a single mask process.
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| 申请公布号 |
US2009257105(A1) |
申请公布日期 |
2009.10.15 |
| 申请号 |
US20080101073 |
申请日期 |
2008.04.10 |
| 申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC. |
发明人 |
XU GANG;WANG CHUN-MING;ZHONG FAN;LUO QI |
| 分类号 |
G02B26/00 |
主分类号 |
G02B26/00 |
| 代理机构 |
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代理人 |
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