| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of easily manufacturing a quasi-phase matching wavelength conversion device that efficiently generates laser beams of various wavelengths at high power. SOLUTION: Respective GaAs plates 21, 22 having the same crystal orientation are attached to first and second sample holders 12, 13 arranged in a vacuum chamber 11 so that [001] directions in plate surfaces are mutually different by 180°. Operation for irradiating the surfaces 21a, 22a of the plates 21, 22 with Ar beams in vacuum for prescribed time to etch and activate the surfaces 21a, 22a, and then sticking and joining the surfaces 21a, 22a to each other at room temperature to join both the plates 21, 22 to each other at room temperature is repeated to manufacture a GaAs wavelength conversion device in which a plurality of plates are joined so that [001] directions in the surfaces of adjacent plates are mutually different by 180°. COPYRIGHT: (C)2010,JPO&INPIT |
