A METHOD OF MONITORING A SURFACTANT IN A MICROELECTRONIC PROCESS BY FLUORESCENCE
摘要
<p>A method of monitoring a surfactant in a microelectronic process is disclosed. Specifically, the monitoring of a surfactant occurs by studying the fluorescence or electromagnetic emission of a sample collected from a microelectronic process.</p>
申请公布号
WO2009126147(A1)
申请公布日期
2009.10.15
申请号
WO2008US59642
申请日期
2008.04.08
申请人
NALCO COMPANY;JENKINS, BRIAN V.;HOOTS, JOHN E.;TSENG, AMY M.
