发明名称 FUNCTIONAL SOLUTION SUPPLY SYSTEM
摘要 <p>Provided is a functional solution supply system for producing sulfuric electrolyte efficiently as a functional solution and for supplying persulfate produced by electrolysis, efficiently to a using side while suppressing autolysis. The functional solution supply system produces the functional solution by electrolyzing a sulfuric solution, and supplies the functional solution to the using side. The system comprises a reserving bath (2) for reserving the sulfuric solution, an electrolytic device (an electrolytic cell (3)) for electrolyzing the sulfuric solution, a heating means (a heater (4)) for heating the sulfuric solution, a cooling means (a cooler (4)) for cooling the sulfuric solution, a first circulation line (11) for returning the sulfuric solution discharged from the reserving bath (2), not through the heating means but through the electrolytic device to the reserving bath (2), a second circulation line (12) for returning the sulfuric solution introduced from the using side (a washing machine (1)), not through the heating means but through the cooling means and the reserving bath (2) sequentially in the recited order to the using side, and a third circulation line (13) for returning the sulfuric solution introduced from the using side, not through the cooling means and the reserving bath (2) but through the heating means (the heater (4)) to the using side.</p>
申请公布号 WO2009125642(A1) 申请公布日期 2009.10.15
申请号 WO2009JP54631 申请日期 2009.03.11
申请人 KURITA WATER INDUSTRIES LTD.;UCHIDA, MINORU;NAGAI, TATSUO;YAMAKAWA, HARUYOSHI 发明人 UCHIDA, MINORU;NAGAI, TATSUO;YAMAKAWA, HARUYOSHI
分类号 H01L21/304;C25B1/30;H01L21/027 主分类号 H01L21/304
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