TEMPERATURE REGULATING MODULE AND APPARATUS FOR SEMICONDUCTOR DEVICE AND TEMPERATURE CONTROL METHOD USING THE SAME

摘要

PURPOSE: A temperature control module for a semiconductor device tester and a method for controlling the temperature using the same are provided to control the temperature rapidly by directing blowing the air passing through the heat exchanger to the semiconductor device. CONSTITUTION: A temperature controller(800) for a semiconductor device tester includes a temperature control module(800a) for testing a plurality of semiconductor devices arranged in a matrix type. A heat exchanger is inserted between a first thermoelectric element and a second thermoelectric element to exchange the heat with the air blown to the semiconductor device. The controller controls the amount and direction of the current applied to the first thermoelectric element and the second thermoelectric element according to the temperature of the air. A match plate includes a guide hole. The guide hole is interposed between the semiconductor device and the heat exchange unit and induces the air to the surface of the semiconductor device. A temperature sensor(300) is installed in the fixing unit between two adjacent temperature control modules for the semiconductor device tester.