MULTIPLE PROTOTYPING METHOD FOR MECHANICAL CAPACITIVE MICROSENSORS

摘要

The invention relates to a multiple prototyping method for mechanical capacitive microsensors, based on the identification of the value of a pre-determined number of geometric parameters of the mechanical microsensors, including the following steps: defining microstructures (2) in a substrate (2); defining a capacitor plate (3) on the microstructures (2); positioning a second rigid capacitor plate (9) in a second upper substrate layer (8); defining cavities (12) in a third lower substrate layer (10); stacking and affixing the three substrate layers (5, 8 and 10).