| 摘要 |
PURPOSE: A design method for pump voltage generator is provided to perform uniformly the semiconductor manufacturing processing procedure. CONSTITUTION: The driving method of the pump voltage generator includes the first control and the second control. The first control arranges dispersively the pump voltage generators in the peri area. The first controls confirm the operation condition which the power noise is in minimum. The first control is performed with eight action modes by the combination of three operating signals. The second control controls the operation of the pump voltage generator in the wafer test level. The second control controls supply of the oscillator signal inputted to each pump voltage generator.
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