MICROVALVE AND MICROPUMP

摘要

PROBLEM TO BE SOLVED: To provide a microvalve and a micropump inexpensively produced in large quantities while having sufficient pressure tightness. SOLUTION: This microvalve 6 for inflow includes: a valve element 10 formed by pressing a metal plate; a metal outer bush (a first columnar portion) 13 having a bottomed recessed portion 11 formed in one end 13a in order to store the valve element 10 and a first minute channel 12 passing from the bottom 11A of the recessed portion 11 through the other end 13b along a center axis CL; a metal inner bush (a second columnar portion ) 16 press-fitted into the recessed portion 11 together with the valve element 10 and having a second minute channel 15 passing through along the center axis CL; and a valve seat 17 arranged oppositely to the valve element 10 at the end of the second minute channel 15. COPYRIGHT: (C)2010,JPO&INPIT