RADIATION INSPECTION DEVICE, RADIATION INSPECTION METHOD USING IT AND RADIATION INSPECTION PROGRAM

摘要

<P>PROBLEM TO BE SOLVED: To provide a radiation inspection device selecting a photographing method corresponding to an inspection target and shortening an inspection time. Ž<P>SOLUTION: The radiation inspection device 10 is equipped with: a radiation output means (radiation generator) 11 for outputting radiation to a predetermined solid angle range; an inspection target plane moving means (X-Y stage) 12 for moving the inspection target; and a radiation transmitting image acquiring means (radiation acquiring mechanism) 13 for acquiring the radiation transmitting image of the inspection target. The radiation transmitting image acquiring means is equipped with a radiation detector for detecting transmitted radiation, a detector rotating and moving part for rotating and moving the radiation detector and a detector linear moving part for linearly moving the radiation detector. The radiation transmitting image for forming the three-dimensional reconstituted image of the inspection target is acquired by both the rotary movement of the radiation detector by the detector rotating and moving part and the linear movement of the radiation detector by the detector linear moving part. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž