METHOD FOR FILM FORMATION, APPARATUS FOR FILM FORMATION, AND COMPUTER-READABLE RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To improve a film formation speed of a metal film and in-plane uniformity of film thickness thereof while suppressing excessive decomposition of a metal carbonyl material, in a formation method of forming a metal film on a treatment object substrate by supplying a metal carbonyl material along with carbon monoxide.

SOLUTION: This method for film formation is characterized by including: running a treatment gas stream containing a metal carbonyl-containing treatment gas and a carbon monoxide-containing carrier gas into a region on the radially upper outside of the outer periphery of a treatment object substrate while avoiding the surface of the treatment object substrate; and diffusing the metal carbonyl from the treatment gas stream into the surface of the treatment object substrate to form a metal film on the surface of the treatment object substrate.

COPYRIGHT: (C)2010,JPO&INPIT