发明名称 |
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, AND EXPOSURE OPTICAL SYSTEM |
摘要 |
An illumination optical system to illuminate an illumination target surface with light from a light source comprises a distribution forming optical system including an optical integrator and forming a pupil intensity distribution on an illumination pupil located behind the optical integrator; and a transmission filter with a transmittance characteristic varying depending upon an angle of incidence of light, which is arranged in an illumination pupil space between an optical element with a power adjacent in front of the illumination pupil and an optical element with a power adjacent behind the illumination pupil and which is arranged at a position of incidence of light to pass through only a partial region of the illumination pupil or light having passed through only a partial region of the illumination pupil.
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申请公布号 |
US2009257043(A1) |
申请公布日期 |
2009.10.15 |
申请号 |
US20090371166 |
申请日期 |
2009.02.13 |
申请人 |
NIKON CORPORATION |
发明人 |
MORI TAKASHI;TANAKA HIROHISA |
分类号 |
G03B27/72 |
主分类号 |
G03B27/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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